JPH0151303B2 - - Google Patents

Info

Publication number
JPH0151303B2
JPH0151303B2 JP17564084A JP17564084A JPH0151303B2 JP H0151303 B2 JPH0151303 B2 JP H0151303B2 JP 17564084 A JP17564084 A JP 17564084A JP 17564084 A JP17564084 A JP 17564084A JP H0151303 B2 JPH0151303 B2 JP H0151303B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
element block
block group
parallel
parallel surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17564084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156836A (ja
Inventor
Kazuma Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP17564084A priority Critical patent/JPS6156836A/ja
Publication of JPS6156836A publication Critical patent/JPS6156836A/ja
Publication of JPH0151303B2 publication Critical patent/JPH0151303B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
JP17564084A 1984-08-23 1984-08-23 精密位置決めテ−ブル Granted JPS6156836A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17564084A JPS6156836A (ja) 1984-08-23 1984-08-23 精密位置決めテ−ブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17564084A JPS6156836A (ja) 1984-08-23 1984-08-23 精密位置決めテ−ブル

Publications (2)

Publication Number Publication Date
JPS6156836A JPS6156836A (ja) 1986-03-22
JPH0151303B2 true JPH0151303B2 (en]) 1989-11-02

Family

ID=15999618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17564084A Granted JPS6156836A (ja) 1984-08-23 1984-08-23 精密位置決めテ−ブル

Country Status (1)

Country Link
JP (1) JPS6156836A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071162B2 (ja) * 1986-10-15 1995-01-11 株式会社ミツトヨ 光学式測定機
JP2503530B2 (ja) * 1987-09-18 1996-06-05 株式会社精工舎 両面記録式タイムレコ―ダ
JP2997474B2 (ja) * 1989-01-31 2000-01-11 株式会社東芝 テーブル装置およびテーブル装置の製造方法

Also Published As

Publication number Publication date
JPS6156836A (ja) 1986-03-22

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